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Vacuum Transport Robot Product List

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3-Axis Cylindrical Coordinate Vacuum-Compatible Clean Robot LVHR3000 Series

The S-shaped acceleration and deceleration control enables high-speed and high-precision transport of glass substrates.

The LVHR3000 series vacuum-compatible clean robot with a 3-axis cylindrical coordinate system, designed for glass substrates, is suitable for transporting glass substrates in liquid crystal manufacturing equipment and inspection devices. It transports glass substrates at high speed and high precision through S-curve acceleration and deceleration control. It can accommodate optimal chucks tailored to the transported items and equipment layout. For more details, please contact us or refer to the catalog.

  • Transport and handling robots
  • Other industrial robots
  • Vacuum Transport Robot

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[Free Catalog] "Robot for Transporting Semiconductor Wafers and Glass Substrates"

<High precision, high speed, high rigidity> We offer specifications of all sizes for both atmospheric and vacuum applications!

This catalog is the product catalog of Aitec Co., Ltd., a specialized manufacturer of robots for transporting semiconductor wafers and glass substrates. It includes the "Wafer Vacuum Transport Robot (up to 450mm)" as well as the "GLASS Vacuum Transport Robot (G2-G5 generations)" and the "GLASS Atmospheric Transport Robot (up to G4 generation)." [Contents] ■ Wafer Vacuum Transport Robot (up to 450mm) ■ Wafer Atmospheric Transport Robot (up to 450mm) ■ GLASS Vacuum Transport Robot (G2-G5 generations) ■ GLASS Vacuum Transport Robot (G5.5-G8.5 generations) ■ GLASS Atmospheric Transport Robot (up to G4 generation) *For more details, please download the PDF or feel free to contact us.

  • Other industrial robots
  • Wafer
  • Vacuum Transport Robot

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